Detection system for substrate clamp

ABSTRACT

The present invention provides a method and apparatus for determining whether a substrate is in a clamped or unclamped state on a robot blade and preferably allows the position of a properly clamped substrate to be compensated for misalignments due to substrates not at or very near to their nominal positions on the blade. A sensor unit comprising a radiation source and a detector and capable of transmitting and receiving a signal is mounted outside a transfer chamber and is positioned to direct the signal therein. A robot blade having a reflecting member is actuated through the transfer chamber and into the path of the signal. The reflecting member is preferably positioned on a clamp finger and causes the signal to be reflected to the detector of the sensor unit when the signal is incident on the reflecting member. As the reflecting member moves through the signal the output of the sensor unit switches states, thereby generating values corresponding to the position of the reflecting member. Positional information may be derived from these values by comparison to predetermined, nominal positional information. The substrate is determined to be either unclamped, in which case the system is halted for operator intervention, or clamped. If the substrate is clamped, the derived positional information can be used to make adjustments for deviations from a nominal position due to variations in the diameter of the substrate.

This is a continuation of copending application (s) Ser. No. 09/349,001filed on Jul. 7, 1999 now U.S. Pat. No. 6,166,509.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a method and apparatus for detectingand adjusting the position of a substrate on a robot blade.

2. Background of the Related Art

A common configuration for processing equipment utilizes a number ofdifferent processing chambers accessible from a central chamber, knownas a transfer chamber. Typically, transfer of a substrate between thevarious processing chambers is performed by a robot disposed in thetransfer chamber. To accommodate the high throughput requirements ofsemiconductor processing, the robots are adapted for accurate,high-speed movement. The robot includes a substrate seating surface forsupporting a substrate thereon and is capable of rotation and extension.Clamping mechanisms are typically used to secure the substrate to thesubstrate seating surface and prevent slippage which can result indamage.

An exemplary frog-leg type robot 10 is shown in FIG. 1. The robot 10comprises a four-bar linkage 12 mounted to a pair of central hubs 14(only one shown) which may be actuated by stepper motors (not shown). Arobot blade 16 connected to the linkage 12 is adapted to support asubstrate 18 thereon. Clamp fingers 20 are provided to secure thesubstrate 18 during movement of the blade 16. In operation, the hubs 14are rotated by the stepper motors to cause linear and rotationalactuation of the robot blade 16. Rotation of the hubs 14 in the samedirection causes rotation of the blade 16 while rotation of the hubs 14in opposite directions causes extension and retraction of the blade 16.When a substrate 18 is disposed on the blade 16, the clamp fingers 20are actuated toward the edge of the substrate 18 to urge the substrate18 against a shoulder 22, or “shoe.” Thus, the shoulder 22 and the clampfingers 20 cooperate to hold the substrate 18 during movement of therobot 10. FIG. 2 shows a substrate 18 properly positioned between theshoulder 22 and the clamp fingers 20.

Normally, stepper motor driven robots under computer control, such asthe one shown in FIG. 1, are capable of repeatedly transportingsubstrates through a processing system with great speed and precision.However, the effectiveness of such substrate handling techniques can begreatly diminished if the initial position of the substrate is notknown. For example, FIG. 3 shows a substrate 18 improperly positioned onthe blade 16, wherein a portion of the substrate 18 is disposed on theshoulder 22. Such positioning of the substrate may occur duringoperation for various reasons. For example, the lift mechanism (liftpins) which deposits the substrate onto the blade may be improperlyadjusted and vibrate, thereby causing the substrate to “walk” on thelift mechanism. Other causes include the effects of processing on thesubstrate due to gases delivered to the backside of the substrate andthe plasma used during deposition of a material onto the substrate.Regardless of the cause for improper substrate positioning, uponactuation of the blade 16, an improperly positioned substrate 18 willlikely slip from the blade 16 and be damaged. The likelihood of slippageis particularly great during rotation of the blade 16. Because currenttechnology does not provide an accurate method of determining whether asubstrate is securely clamped, substrates fall from the blade causingdamage to the substrate, thereby requiring the system to be halted foroperator intervention. The problems associated with unclamped substratesare heightened by use of increasingly faster robots.

Another problem associated with substrate transfer robots is thepotential for misalignment of a properly clamped substrate in a chamber.In semiconductor processing, it is desirable to know the exact locationof a substrate relative to the robot blade so that the substrate can beprecisely positioned at an optimum location at a final destination suchas within a processing chamber. Knowledge of the substrate positionallows repeatably positioning substrates in a chamber at substantiallythe same location, thereby maximizing the effectiveness of theprocessing onto the desired surface area of the substrate to beprocessed. Ideally, clamped substrates being transferred by the robotare situated at the substrate's nominal position within the pocket ofthe blade. In practice, however, substrates are not always disposed ator substantially near the nominal position causing the robot to depositthe substrate in the chamber at a position displaced from the intendeddestination. Therefore, current methods utilize centerfinding techniquesto determine the centerpoint of each substrate and position thesubstrate accordingly, thereby ensuring that each substrate ispositioned uniformly relative to the known centerpoints.

While methods for substrate centerfinding are known, current technologydoes not provide a method or apparatus for detecting the clamped orunclamped state of a substrate as well as allow for corrections insubstrate positioning to ensure proper alignment in a process chamber.Further, known methods of centerfinding have several disadvantagesresulting in reduced throughput and increased complexity and cost. Forexample, one known method comprises a bank of sensors and detectorsdisposed inside the vacuum environment of a processing system. Asubstrate is moved into the optical paths of the signals emitted by thesensors, thereby blocking the signals. Once the signals become blockedthe output of the detectors switches states. The change in the output ofthe detectors is then used to calculate the center of the substrate. Therequirement of multiple sensors is a disadvantage because of the costand increased complexity of the system. Typically, such an arrangementis feasible only at one location in the processing system requiringsubstrates to be transported to the location of the bank of sensors eachtime centerfinding is to be performed, thereby limiting throughput.Further, by positioning the sensors inside the vacuum environment thesensors can outgas particles leading to contamination of the substrates.Thus, it would be preferable to perform the centerfinding on-the-fly,i.e., during the normal operating sequences of a robot in order tominimize the impact on throughput. It would also be preferable to limitthe number of electronic sensing components and to position thecomponents outside the vacuum environment of the processing chamber.

Other centerfinding techniques utilize a spindle type apparatus wherebythe substrate is transferred to a spindle assembly and incrementallyrotated to determine the centerpoint offset by geometric analysis. Suchan arrangement is undesirable because the apparatus is separate anddistinct from the processing system, thereby requiring additional stepsand costs to the manufacturing process and inhibiting productivity.

Therefore, there is a need for an apparatus and method to determine theclamped or unclamped state of a substrate on a robot support member aswell as allow for necessary corrections in the position of the substratein a process chamber. Preferably the apparatus is positioned outside avacuum environment of a processing chamber and is adapted to operateon-the-fly.

SUMMARY OF THE INVENTION

The present invention generally provides a method and apparatus forderiving positional information about a substrate disposed on a robotblade. Initially, a determination is made whether a substrate is in aclamped or unclamped state on a robot blade. If the substrate isproperly clamped, the center of the substrate is determined so that anymisalignment of the center relative to a nominal position on the blademay be corrected.

In one aspect of the invention, a sensor unit, preferably comprising aradiation source and a detector and capable of transmitting andreceiving a signal, is positioned to direct a signal along an opticalpath intersecting a substrate path. A substrate support member having areflecting member disposed thereon is positionable in the optical pathof the signal by a robot. The reflecting member is preferably positionedon a clamp finger and is adapted to reflect a portion of the signal backto the detector of the sensor unit when the signal is incident on thereflecting member.

In another aspect of the invention, a sensor unit is disposed in aregion external to a transfer chamber and is positioned to transmit asignal therein. The sensor unit preferably comprises a radiation sourceto emit the signal and a detector to receive a reflected portion of thesignal. In one embodiment, the radiation source and the detector areseparate components. The transfer chamber includes a chamber body and alid having viewports formed therein and is in communication with one ormore adjacent chambers via a vacuum sealable opening. A robot disposedin an enclosure defined by the transfer chamber comprises a supportmember having a blade to support a substrate thereon. The support memberincludes one or more clamp fingers adapted to secure the substrate tothe blade during transfer through the transfer chamber. A reflectingmember is disposed on at least one of the clamp fingers and ispositionable in the path of the signal to reflect a portion thereof tothe detector. The position of the one or more clamping fingers, and thusthe reflecting member, is determined by the position of a substratedisposed on the support member. If the substrate is properly clamped theone or more clamp fingers and reflecting members are in a firstposition, whereas if the substrate is improperly clamped the one or moreclamp fingers and reflecting member are in a second position. The firstand second positions are detected by the sensor unit and compared tocalibrated values to determine the position of the substrate.

In yet another aspect of the invention, a method for detecting whether asubstrate disposed on a support member is clamped or unclamped on asupport member by at least one clamp finger movably connected to thesupport member is provided. Initially, a substrate is positioned on thesupport member and secured by actuating the clamp finger toward thesubstrate. The support member is actuated by a robot motor to position areflecting member disposed on one of the clamp fingers into a signalpath to reflect a portion of the signal. The reflected portion of thesignal is detected and causes an output of the detector to switch from afirst state to a second state. The change in output states is associatedwith an actual positional value of the clamp finger and compared to acalibrated positional value to determine whether the substrate isclamped. Preferably, the actual and calibrated positional values of theclamp finger are derived from positional values of the robot motor.

In yet another aspect of the invention, a method for generatingpositional information about a substrate disposed on a support member isprovided. Initially, a substrate is positioned on the support member andsecured by actuating one or more clamp fingers toward the substrate. Thesupport member is actuated by a robot motor to position a reflectingmember disposed on one of the clamp fingers into a signal path toreflect a portion of the signal. The reflected portion of the signal isdetected and causes an output of the detector to switch from a firststate to a second state. The change in output states is associated withan actual positional value of the clamp finger and compared to acalibrated positional value to determine whether the substrate isclamped. Preferably, the actual and calibrated positional values of theclamp finger are derived from positional values of the robot motor. Ifthe substrate is clamped, the center of the substrate can be determinedby calculating a distance between the position of the clamp finger andthe calibrated position of the clamp finger for a nominal substrate. Thecalculated distance may then be used to adjust a destination coordinateof the substrate to ensure proper alignment of the substrate at asubsequent destination.

In still another aspect of the invention, a method is provided fordetermining positional information about a substrate disposed on a bladeactuated by a robot located in a transfer chamber. The method determineswhether a substrate disposed on a blade is clamped or unclamped by atleast one clamp finger movably connected to the blade. A signal istransmitted from a region exterior to the transfer chamber into anenclosure defined by the transfer chamber. A substrate is positioned onthe blade and one or more clamp fingers are actuated toward thesubstrate. The blade is actuated by the robot to cause linear movementof the blade along a transfer plane. During the linear movement of theblade, a reflecting member disposed on one of the clamp fingersintercepts the signal to reflect a portion thereof. The reflectedportion of the signal is detected and causes an output of the detectorto switch from a first state to a second state. The change in outputstates is associated with an actual positional value of the clamp fingerand then compared to a calibrated positional value to determine whetherthe substrate is clamped. Preferably, the actual and calibratedpositional values of the clamp finger are derived from positional valuesof the robot motor. If the substrate is clamped, the center of thesubstrate can be determined by calculating a distance between theposition of the clamp finger and the calibrated position of the clampfinger for a nominal substrate. The calculated distance may then be usedto adjust a destination coordinate of the substrate to ensure properalignment of the substrate at a subsequent destination, therebycompensating for any deviations from the nominal substrate.

BRIEF DESCRIPTION OF THE DRAWINGS

So that the manner in which the above recited features, advantages andobjects of the present invention are attained and can be understood indetail, a more particular description of the invention, brieflysummarized above, may be had by reference to the embodiments thereofwhich are illustrated in the appended drawings.

It is to be noted, however, that the appended drawings illustrate onlytypical embodiments of this invention and are therefore not to beconsidered limiting of its scope, for the invention may admit to otherequally effective embodiments.

FIG. 1 is an exemplary frog-leg type stepper motor robot.

FIG. 2 is a side view showing a substrate properly positioned on asubstrate support and secured by clamp fingers.

FIG. 3 is a side view showing a substrate improperly positioned on asubstrate support and unsecured by clamp fingers.

FIG. 4 is a top view of a processing system 50 of the present invention.

FIG. 5 is a partial cross sectional front view of a transfer chamber anda process chamber of the processing system of FIG. 4 showing the supportmember supporting a substrate.

FIG. 6 is a side view of FIG. 5.

FIG. 7 is a top view of a support member having a substrate disposedthereon and having clamp fingers in a fully retracted position.

FIG. 8 is a top view of a support member having a substrate disposedthereon and having clamp fingers in a fully extended position.

FIG. 9 is a partial top view of the processing system of FIG. 4 showingthe support member fully extended into a process chamber.

FIG. 10 is a partial top view of the processing system of FIG. 4 showingthe support member fully retracted in a transfer chamber.

FIGS. 11-13 are side views showing a support member in a series ofconsecutive positions during retraction from a process chamber in atransfer chamber.

FIG. 14A is a top view of a support member having a properly clampedsubstrate disposed thereon and showing a pass/fail window.

FIG. 14B is a side view of FIG. 14A.

FIG. 15A is a top view of a support member having an unclamped substratedisposed thereon and showing a pass/fail window.

FIG. 15B is a side view of FIG. 15A.

FIG. 16 is a top view of a support member illustrating the positions ofvarious substrate sizes with respect to the support member and apass/fail window.

FIG. 17 is a partial cross sectional front view of the transfer chamberand the process chamber of the processing system of FIG. 4 showinganother embodiment of the invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT

The present invention generally provides a method and apparatus forderiving positional information about a substrate disposed on a robotblade. Initially, a determination is made whether a substrate is in aclamped or unclamped state on the robot blade. If the substrate isproperly clamped, the center of the substrate is determined so that anymisalignment of the center relative to a nominal position on the blademay be corrected. A sensor unit, preferably comprising a radiationsource and a detector and capable of transmitting and receiving asignal, is mounted outside a transfer chamber and is positioned todirect the signal therein. A substrate support member having areflecting member is actuated through the transfer chamber and into thepath of the signal. The reflecting member is preferably positioned on aclamp finger and causes the signal to be reflected to the detector of asensor unit when the signal is incident on the reflecting member. As thereflecting member moves through the signal, the output of the sensorunit switches states, thereby generating values corresponding to theposition of the reflecting member. The resulting values are compared topredetermined, nominal values to derive positional informationpertaining to a substrate disposed on the support member. The substrateis determined to be either unclamped, in which case the system is haltedfor operator intervention, or clamped. If the substrate is clamped, thederived positional information can be used to make adjustments fordeviations from a nominal position due to variations in the diameter ofthe substrate.

FIG. 4 is a top view of a processing system 50 of the present invention.A portion of the lid 74 has been cut away to reveal details of theprocessing system 50. The processing system 50 is typically known as acluster tool. Two such systems are the Centura® and the Endura® bothavailable from Applied Materials, Inc., of Santa Clara, Calif. Thedetails of one such staged-vacuum substrate processing system isdisclosed in U.S. Pat. No. 5,186,718, entitled “Staged-Vacuum WaferProcessing System and Method,” Tepman et al., issued on Feb. 16, 1993,which is incorporated herein by reference. The exact arrangement andcombination of the chambers may be altered for purposes of performingspecific steps of a fabrication process.

In accordance with the present invention, the processing system 50generally comprises a plurality of chambers and robots and is preferablyequipped with a microprocessor/controller 52 programmed to control thevarious processing methods performed in the processing system 50. Afront-end environment 54 is shown positioned in selective communicationwith a pair of load lock chambers 56. A pod loader 58 disposed in thefront-end environment 54 is capable of linear and rotational movement toshuttle cassettes of substrates to and from the load locks 56. The loadlocks 56 provide a first vacuum interface between the front-endenvironment 54 and a transfer chamber 60. A robot 62 is centrallydisposed in the transfer chamber 60 to transfer substrates from the loadlocks 56 to one of the various processing chambers 64 and servicechambers 65. The robot 62 is a frog-leg type robot capable of extension,retraction, and rotation and is actuated by a stepper motor. A supportmember 66 connected to the robot linkage 68 is adapted to support asubstrate 70 during transfer through the transfer chamber 60 and betweenthe chambers 64, 65 and the load locks 56. The processing chambers 64may perform any number of processes such as physical vapor deposition,chemical vapor deposition, electroplating and etching while the servicechambers 65 are adapted for degassing, orientation, cooldown and thelike. A number of view ports 72 formed in a lid 74 of the transferchamber 60 provide visual access into the transfer chamber 60.

While the invention has application in any arrangement requiring thedetermination of substrate positional information, processing systemssuch as the one shown in FIG. 4 are particularly well-suited because ofthe volume of traffic accommodated by the transfer chamber 60 andbecause of the view ports 72 which provide a line-of-sight into thetransfer chamber 60. As will be described below, the view ports canaccommodate a signal from a source positioned externally to the vacuumenvironment of the transfer chamber 60. It is understood that otherapplications of the invention are contemplated.

FIGS. 5 and 6 are partial cross sectional front and side views,respectively, of the transfer chamber 60 and a process chamber 64 of theprocessing system 50 (shown in FIG. 4) showing the support member 66supporting a substrate 70. The transfer chamber 60 and the processchamber 64 are in communication with one another through a vacuumsealable opening 69 which can be selectively closed by a gate valve (notshown) or similar device. The transfer chamber 60 is defined by a body73 and the lid 74 disposed thereon to form an enclosure 78. A radiationtransparent plate 80 is disposed in the view port 72 to allowtransmission of a signal 82 into the enclosure 78. The transparent plate80 is preferably made of quartz but may also be made of Pyrex™ sapphireor other radiation transparent material which can accommodate a desiredoperating wavelength.

A sensor unit 84 is disposed outside the transfer chamber 60 and ispositioned to direct a signal 82 into the enclosure 78 through thetransparent plate 80. Preferably, the sensor unit 84 is mounted to thetransparent plate 80 by a bracket 86 that allows for alignmentadjustments and is positioned externally to the enclosure 78. Whilepositioning the sensor unit 84 external to the enclosure 78 facilitateseasy access to the sensor unit 84, the invention also contemplatespositioning the sensor unit 84 inside the enclosure 78. The sensor unit84 preferably includes both a radiation source for generating the signal82 and a detector for receiving and detecting a reflected portion of thesignal 82. Although the radiation source and the detector are preferablycomponents of a single sensor unit 84 as shown in FIGS. 5 and 6, theradiation source and the detector may also be separate components. Onesensor unit 84 which may be used to advantage is the PicoDot™ convergentlaser sensor, having an operating wavelength 670 nm, model numberPD45VN6C100, available from Banner Engineering Corporation ofMinneapolis, Minn. In operation, the output of the sensor unit 84switches between at least a first state and a second state, depending onwhether the reflected portion of the signal 82 is detected or not. Theoutput is in a first state when no reflected portion of the signal 82 isdetected. The output is in a second state when a reflected portion ofthe signal 82 is received and detected by the sensor unit 84. Amicroprocessor/controller 52 is coupled to the sensor unit 84 to receiveelectrical transmissions corresponding to the output of the sensor unit84 and uses the transmissions to generate positional information about asubstrate disposed on the support member 66. Themicroprocessor/controller 52 is also preferably coupled to theprocessing system 50 to operate the components thereof, as describedwith reference FIG. 4.

Reflection of the signal 82 back toward the sensor unit 84 duringoperation is accomplished by positioning a reflecting member 90 in thepath of the signal 82, as shown in FIGS. 5 and 6 (two reflecting members90 are shown, one on each clamp finger 92). Preferably, the reflectingmember 90 is fixedly attached to a clamp finger 92 and, in oneembodiment, may be an integral component thereof Thus, the positioningof the reflecting member 90 relative to the support member 66 isdetermined by the position of the clamp finger 92 which is movablydisposed in a wrist housing 94 of the support member 66. The reflectingmember 90 may comprise any reflective material which does not completelyabsorb the signal 82. Thus, in one embodiment the reflecting member 90is made of aluminum. Preferably, the reflecting member 90 is cylindricalbut more generally may be any geometric shape adapted to reflect aportion of the signal 82 back to the sensor unit 84. For example, thereflecting member 90 may include a planar surface at an upper end of thereflecting member 90 oriented perpendicularly relative to the signal 82in order to cause reflection of the signal 82 when the reflecting member90 is positioned in the path of the signal 82. In another embodiment,the reflecting member 90 may be a polished surface formed on a clampfinger 92 itself and oriented to reflect the signal 82 to the sensorunit 84.

The structure and operation of the support member 66, clamp fingers 92,and reflecting member 90 can be illustrated with reference to FIGS. 6-10which illustrate the clamp fingers 92 in extended and retractedpositions. Referring first to FIGS. 6 and 8, a side view and a top viewof the support member 66 having a substrate 70 disposed thereon areshown. The support member 66 comprises a blade 67 connected to the wristhousing 94 at an initial end and having a shoulder 100, or shoe, at aterminal end. Clamp fingers 92 extend from the wrist housing 94outwardly toward the shoulder 100 and cooperate with the shoulder 100 todefine a pocket for accommodating substrates of a known diameter.Although preferably two clamp fingers 92 are provided, the number anddesign of the clamp fingers 92 is not considered limiting of the presentinvention. The actuation of the clamp fingers 92 may be achieved by aclamping mechanism (not shown) located in the wrist housing 94 which mayinclude various camming members and biasing members such as extensionsprings and leaf springs as are known in the art. The clamping mechanismis constructed to move the clamp fingers outwardly of the wrist housing94 and toward the shoulder 100 until reaching a fully extended terminalposition. The degree of extension of the clamp fingers 92 for asubstrate of a particular diameter depends on whether the substrate isproperly clamped. When a substrate is properly positioned in the pocketof the blade 67 the clamp fingers 92 abut the edge of the substrate andare prevented from reaching their fully extended position because of theopposing force provided by the substrate. When, however, the substrateis improperly positioned, such as when a portion of the substrate isdisposed on the shoulder 100, i.e., “out of pocket,” the clamp fingers92 continue moving forward, thereby pushing the substrate further out ofpocket, until reaching a fully extended position because nocounteractive force is provided by the substrate. Thus, when thesubstrate is properly seated in the pocket of the blade 67, the clampfingers 92 terminate at a first position short of the fully extendedposition, while when the substrate is improperly positioned, the clampfingers 92 terminate at a second position, i.e., a fully extendedposition.

In operation, the clamp fingers 92 are selectively actuated into and outof the wrist housing 94. In an extended position, shown in FIGS. 6 and8, the clamp fingers 92 contact the edge of the substrate 70 and urgethe substrate 70 against the shoulder 100. The clamp fingers 92 supplysufficient force to secure the substrate 70 during the rotational andtranslational movement of the support member 66. In a retractedposition, shown in FIG. 7, the clamp fingers 92 are pulled partiallyinto the wrist housing 94, thereby providing a sufficient distancebetween the clamp finger tips and the shoulder 100 to allow removal of asubstrate from, or positioning a substrate on, the blade 67.

In general, extension and retraction of the clamp fingers 92 is achievedby the linear movement of the support member 66. When the support member66 is extended, the clamp fingers 92 are retracted to allow transfer ofa substrate from or onto the blade 67. For example, FIG. 9 is a partialtop view of the processing system 50 showing the support member 66 fullyextended into a process chamber 64 for pick-up or delivery of thesubstrate 70. In such a position, the clamp fingers 92 are fullyretracted as shown in FIG. 7. Preferably, the clamp fingers 92 aredesigned to remain clamped until the latter-most portion of theextension stroke, so that a substrate supported by the support member 66remains securely fastened until immediately prior to the termination ofthe stroke. Conversely, the clamp fingers 92 are moved into an extendedposition during retraction of the support member 66 into the transferchamber 60. Thus, FIG. 10 shows the support member 66 fully retracted,in which position the clamp fingers 92 are fully extended (as show inFIG. 8). The extended position of the clamp fingers 92 secures thesubstrate 70 and allows high-speed rotation without causing damage tothe substrate 70 as a result of falling from the support member 66.

During normal operation, a substrate being rotated through the transferchamber 60 is secured on the blade 67 by the extended clamp fingers 92,thereby preventing damage to the substrate. However, as described abovewith reference to FIG. 3, occasionally a substrate is improperlypositioned on the blade 67 and, as a result, is not in a clamped state.The substrate positioning system in accordance with the presentinvention may be used to determine the state of a substrate prior tomovement which may cause the substrate to fall from the blade resultingin damage to the substrate and requiring the system to be halted foroperator intervention. Preferably, the clamped or unclamped state of asubstrate is determined immediately prior to each time a substrate isrotated through the transfer chamber 60, such as when a substrate isremoved from a process chamber or load lock and is shuttled to asubsequent location. The clamp/unclamped state of a substrate isdetermined by changes in the output of the sensor unit 84. When thestepper motor of the robot 62 advances the substrate so that thereflecting member 90 crosses the path of the signal 82 of the sensorunit 84, the output of the sensor unit 84 changes state. That is, theoutput of the sensor unit 84 changes indicating that the signal 82 iseither reflected or not reflected. Thus, preferably, the output of theposition sensor switches between two states, one of which corresponds toa reflected signal and a second that corresponds to an unreflectedsignal.

The operation of the invention will be described in reference to FIGS.11-13, which are side views of the support member 66 in variouspositions relative to a process chamber 64 and the transfer chamber 60.FIG. 11 shows the support member 66 fully extended into the processchamber 64 with the clamp fingers 92 fully retracted and not in contactwith the substrate 70 supported on the blade 67. The signal 82 is shownpropagating uninterrupted toward the floor 76 of the transfer chamber60. Under such conditions, where no reflected portion of the signal 82is detected, the output of the sensor unit 84 is at a first state. Theeffects of background radiation due to other sources in the transferchamber 60 as well as portions of the signal 82 reflected from variouscomponents other than the reflecting member 90 may be mitigated by anymethod known in the art. For example, the output of the sensor unit 84is preferably only monitored during a window of time defined by theretraction of the support member 66 from the process chamber 64 into thetransfer chamber 60. Further, because the expected values for thechanges in the output state of the sensor unit 84 can be known within arange of certainty, all other values can be discarded.

The support member 66 is then retracted through the vacuum sealable slitvalve opening 69 formed between the process chamber 64 and the transferchamber 60, as shown in FIG. 12. Preferably, the clamp fingers 92 arefully extended into contact with the substrate 70 as the support member66 is moved through the opening 69 and before the support member 66 isfully retracted into the transfer chamber 60. During continuedretraction of the support member 66, the reflecting member 90 is movedinto the path of the signal 82 causing a portion of the signal 82 to bereflected back toward the sensor unit 84 and causing the sensor unit 84to switch states upon detection of the reflected portion of the signal82. The output of the sensor unit 84 is thus changed to a second state.As the reflecting member 90 moves past the path of the signal 82, asshown in FIG. 13, the output of the sensor unit 84 switches back to thefirst state. As described in greater detail below, the first and secondstates for each switch in the output of the sensor unit 84 can beassociated with positional information pertaining to the clamp fingers92.

In a preferred embodiment of the present invention, the outputs of thesensor unit 84 are monitored on a regular basis to determine if thesensor unit 84 has changed state in response to the most recentincremental displacement of the support member 66 caused by the robot62. For example, the stepper motors of the robot 62 may be operated bythe microprocessor/controller 52 that generates an interrupt for eachstep of the robot 62. The step interrupt generated by the lineartranslation of the stepper motor increments a counter with each step ofthe robot 62 and can be used to trigger a state check of the sensor unit84 to determine whether the output of the sensor unit 84 has changedsince the previous check. When the state check indicates that the stateof the sensor unit 84 has changed, the microprocessor/controller 52(shown in FIGS. 5-6) stores the encoder value of the stepper motorassociated with the output change of the sensor unit 84. Thus, for theillustration described above with reference to FIGS. 11-13, two encodervalues are captured and recorded. A first encoder value is recorded whenthe reflecting member 90 moves into the path of the signal 82 as shownin FIG. 12, and a second encoder value is recorded when the reflectingmember 90 is moved out of the signal 82 path as shown in FIG. 13.

The encoder values associated with a state change in sensor unit 84 arethen compared to calibrated encoder values obtained from a nominallysized substrate. The microprocessor/controller 52 may, for example,compare the derived encoder values to the stored calibration values bymeans of a lookup table. A lookup table is generally preferred becauseof a nonlinear relationship between robot steps and distance associatedwith frog-leg type robots. Thus, the data from which the substrateclamped/unclamped state is calculated are encoder values of the robotrecorded when the sensor unit 84 changes its state. If the recordedencoder values match the stored calibrated values for a nominalsubstrate, the substrate disposed on the support member 66 is assumed tobe properly clamped, otherwise the substrate is considered to beunclamped and the system is halted for operator intervention.

Although in the foregoing illustration two encoder values are recorded,it is understood only one value is necessary to determine the positionof the clamping finger 92 and reflecting member 90. Whether more thanone value is recorded is dependent on the width of the clamp fingers 90as well as the need to accommodate a range of substrate diameters for agiven nominal size, as will be described in detail below. However, evenwhen two encoder values are recorded, one may be discarded while theother is used to determine the position of the reflecting member.

The accuracy and repeatability of the present invention is determinedprimarily by the inherent tolerances of the robot 62, the sensor unit84, and the clamping fingers 92. As referred to herein, repeatability isthe ability of the invention to reproduce a result under similarconditions or stimuli, while accuracy is the degree of conformitybetween a measured value and the true value. For example, the robot 62may be capable of repeatedly positioning the support member 66 within ±5mils (five thousandths of an inch) of a particular position.Additionally, the sensor unit 84 and the clamp fingers 92 (morespecifically the clamping mechanism which actuates the clamp fingers 92)are inherently limited in their repeatability. Each source of limitedrepeatability is a source of deviation and contributes to the totalsystem error. The range of the total system deviation, or error, isdefined as the pass/fail window, and acts as a limitation on the presentinvention to detect whether a substrate is unclamped. A reflectingmember 90 position detected within the pass/fail window may be theresult of an unclamped substrate or may be due to the deviation in thesystem repeatability, such as robot position repeatability. In order todifferentiate between the deviation in the system repeatability and anundamped substrate, the clamp fingers 92 are designed to purposely urgethe unclamped substrate further out of pocket in order to reach aterminal position sufficient to move the reflecting member 90 a distancegreater than the pass/fail window. If the reflecting member 90 isdetected at a position outside the pass/fail window the substrate isdetermined to be unclamped. Thus, the pass/fail window is the minimaldistance the substrate must be pushed out of pocket in order to bedetected as unclamped. The pass/fail window may be minimized in variousways known to persons skilled in the art such as improving therepeatability of the robot 62, sensor unit 84, and clamping mechanismwhich actuates the clamp finger 92. While a perfect system isconceivable, i.e., a system with no sources of error or a system whereinthe error is considered negligible, the following discussion assumes animperfect system for illustrative purposes.

The positioning of a substrate taking into account a pass/fail windowcan be illustrated with reference to FIG. 14A-B and 15A-B which showpartial top views and corresponding side views of a support member 66and various positions for a substrate of the same size positioned on thesupport member 66. The support member 66 in FIGS. 14 and 15 is in afully retracted position; thus, the encoder value for the robot 62(shown in FIG. 4) is the same. A first position, shown in FIGS. 14A-B,shows the position of a clamped substrate 102 relative to a pass/failwindow indicated by a distance α. An upper limit 104 and a lower limit106 delimit the pass/fail window. Although typically only a few mils,e.g., less than about 30 mils, α is shown greatly exaggerated here forclarity. A reflecting member 90 detected at any position backward (i.e.,away from the shoulder 100) of the upper limit 104 of the pass/failwindow, will be determined to be clamped. A second position, shown inFIGS. 15A-B, illustrates an unclamped substrate 108 which has beenpushed out of pocket by the distance αto ensure detection of theunclamped state by the sensor unit 84 (shown in FIGS. 5-6). An unclampedsubstrate generally refers to a substrate which was not properly placedin the pocket of the blade 67 so that an edge of the substrate is not inabutment with the shoulder 100. Thus, FIGS. 15A-B show a distal edge 110of the substrate 108 resting on the shoulder 100. Because no resistanceis provided, the clamp fingers 92 continue to urge the substrate 108forward until reaching a fully extended terminal position. Accommodatingthe deviation of the system repeatability, and the resulting pass/failwindow, is accomplished by adjusting the terminal position of the clampfingers 92, such that the difference in distance between the reflectingmember 90 in the clamped state (FIGS. 14A-B) and the reflecting member90 in the unclamped state (FIGS. 15A-B) is greater than α. Thus,referring still to FIGS. 15A-B, the substrate 108 is shown in anunclamped state wherein the substrate 108 has been moved a distancegreater than αout of pocket. In such a position, the sensor unit 84(shown in FIGS. 5-6) and microprocessor/controller 52 (show in FIG. 4)will unambiguously determine that the substrate 108 is unclamped.

Although less likely, another unclamped state occurs when a portion ofthe substrate is disposed on wrist housing 94. In such a case, thereflecting member 90 will be obscured by the substrate and the output ofthe sensor unit 84 will not change during the actuation of the blade 67.Such an event is set by default to indicate an unclamped substrate.

Once a determination is made that a substrate is clamped, the robot 62transfers the substrate to a predetermined destination. However, becausesubstrate diameters may vary from a nominal substrate diameter, apositional correction is necessary to properly align the substrates atthe final destination. Accordingly, for clamped substrates, the presentinvention is also capable of accommodating diameter variations from anominal diameter which requires a correction in the positioning of thesubstrates at a drop-off point.

Adjustments for displacements in the center of a substrate due tovariances in the substrate diameters from a nominal diameter require aninitial determination that the substrate is properly clamped. Such adetermination can be made in a manner similar to that described abovewith respect to FIGS. 11-13. However, an additional positionaladjustment to the clamp fingers 92 and reflecting member 90 is requiredin order to differentiate between unclamped substrates and substrateshaving varying diameters within a known range.

FIG. 16 illustrates the differences in the position of the centers fortwo clamped substrates 114, 116 as compared to a nominally sized clampedsubstrate 112. An X indicates the center of each substrate and Rnom, R2,and R3 indicate the radii for a nominal first substrate 112, a secondsubstrate 114 and a third substrate 116, respectively. The firstsubstrate 112 shows the position of a nominal substrate, the secondsubstrate 114 represents a minimum of the diameter deviation range, andthe third substrate 116 represents a maximum of the diameter deviationrange. The distance between the centers of the nominal first substrate112 and the second substrate 114 is C2 and the distance between thecenters of the first substrate 112 and the third substrate 116 is C3.Although typically only a few mils, e.g., less than about 40 mils, C2and C3 are shown greatly exaggerated here for clarity. The centers areoffset only along one linear direction shown by the arrows. Any initiallateral offset is corrected by the forward movement (shown by thearrows) of the clamp fingers 92. The pass/fail window, described abovewith reference to FIGS. 14-15, is also shown and is indicated by thedistance α. The terminal position of the clamp fingers 92 is adjusted toprevent a minimum diameter deviation, represented by the secondsubstrate 114, from being detected as an unclamped substrate. Thus, todetect an unclamped substrate the clamp fingers 92 must be extended, asindicated by the arrows, at least a distance α plus a distance equal tothe difference in diameters between the second substrate 114,representing the minimum diameter deviation, and the actual substratedisposed on the support member. For example, for a nominally sizedsubstrate the clamp fingers 92 must be extended at least a distanceα+D2, wherein D2 represents the difference in diameters between thenominally sized substrate disposed on the support member 66 and thesecond substrate 114. For a substrate having a diameter equal to that ofthe third substrate 116 the clamp fingers 92 must be extended at least adistance α+D3, wherein D3 represents the difference in diameters betweenthe actual substrate disposed on the support member 66 and the secondsubstrate 114. In summary, the smallest expected substrate and thepass/fail window determine the minimum clamp finger 92 extensionrequired to differentiate between unclamped substrates and variation dueto robot repeatability and substrate diameter variances.

Once a determination is made that the substrate is clamped, the centerof the substrate may be calculated. Preferably, the center is calculatedby determining the encoder values for the actual substrate disposed onthe support member 66, in a manner similar to that described above withreference to FIGS. 11-13, and comparing the encoder values againststored encoder values for a calibrated nominal substrate. The differencein the encoder values corresponds to a distance equaling thedisplacement distance of the actual center of the substrate on the blade67 from the center of the calibrated nominal substrate. For example inFIG. 16, the displacement distances of the second and third substrates114, 116 from the nominal center are C2 and C3, respectively. Thedisplacement distance is then added or subtracted from the linearextension of blade 67 to result in the necessary destination coordinatecorrection. In operation, the microprocessor/controller 52 calculatesthe displacement distance and transmits a signal to the robot 62instructing the robot 62 to position the blade 67 at the appropriatedestination coordinate taking into account the displacement distance.

According to the foregoing embodiments of the invention, the inventorsachieved an accuracy of about 5 to 7 mils in determining the substratediameter and a total system repeatability of about 2 mils. Further, theinventors achieved substrate placement results at a destinationcoordinate of less than about 10 mils. However, it is understood thatthe present invention is not limited in scope by the degree of accuracyor repeatability and persons skilled in the art may obtain betterresults once the nature of the invention is understood as describedabove.

Further, the invention contemplates any number of variations andembodiments wherein the position of a clamp finger is determined. Forexample, in another embodiment, shown in FIG. 17, a reflecting member120 may be positioned on the robot wrist housing 94 in addition to thereflecting member 90 positioned on the clamp finger 92. Each reflectingmember 90, 120 is positioned to intercept the signal 82 during themovement of the blade 67. The position of the clamp finger 92 is thendetermined by calculating the distance between the reflecting members90, 120 based on the recorded encoder values at the time of detection ofeach reflecting member 90, 120 in a manner similar to that describedwith reference to FIGS. 11-13. Such an arrangement is advantageousbecause it is “self calibrating.” That is, the position of the robot 62is not considered relevant because the critical measurement is thedifference in distance between the reflecting members 90, 120. Thus, acomparison between derived encoder values recorded when the output ofthe sensor unit 84 switches states and the stored calibrated encodervalues, as described above, is not necessary.

In still another embodiment, a reflecting member may be embedded in theshoulder 100 of the blade 67 and oriented to reflect a portion of thesignal 82 back toward the sensor unit 84. Thus, a substrate “riding” theshoulder 100, such as is shown in FIGS. 15A-B, will obscure thereflecting member and prevent a portion of the signal 82 from beingreflected. The absence of a detected signal is, by default, treated asan unclamped substrate. Such an arrangement may be used in tandem withone or more additional reflecting members positioned at variouslocations such as on a clamp finger 92, or may be used independently ina strictly “go/no-go” system capable of detecting an unclamped substratebut incapable of adjusting for variances in substrate diameters as wasdescribed with reference to FIG. 16.

Further, the construction of the clamping mechanism is not intended tobe limiting of the invention. Thus, although the foregoing descriptionrelates to clamp fingers 92 adapted for linear extension and retractionrelative to the wrist housing 94 (shown in FIG. 6), the inventioncontemplates other arrangement such as where the clamp fingers arerotationally actuated. Detection is facilitated by adjusting theterminal position of the clamp finger and/or the sensor unit as will beunderstood by those skilled in the art.

While foregoing is directed to the preferred embodiment of the presentinvention, other and further embodiments of the invention may be devisedwithout departing from the basic scope thereof, and the scope thereof isdetermined by the claims that follow.

What is claimed is:
 1. A substrate support member for a robot operablein a semiconductor processing chamber, comprising: (a) a blade forming apocket for receiving a substrate; (b) at least one movable substrateclamping member slidably disposed on the blade and having asubstrate-securing surface at a terminal end of the at least one movableclamping member; and (c) a signal reflecting member disposed on the atleast one movable substrate clamping member wherein the signalreflecting member, during movement of the blade, is positionable in apath of a signal to cause reflection of at least a portion of thesignal, whereby, upon detection of the portion of the signal, theposition of the signal reflecting member is determinable.
 2. Theapparatus of claim 1, wherein the signal reflecting member comprises acylindrical body positionable in a path of a signal emitted from asignal source.
 3. The apparatus of claim 1, wherein the signalreflecting member comprises a metal member having a reflective surfacedisposed thereon, the reflective surface oriented to redirect animpinging signal toward a detector.
 4. The apparatus of claim 1, whereinthe at least one movable substrate clamping member comprises a pair ofclamp fingers each having a signal reflecting member disposed thereon.5. The apparatus of claim 1, further comprising a wrist housing havingthe blade connected thereto and wherein the at least one movablesubstrate clamping member is extendible from the wrist housing toward ashoulder portion disposed on a terminal end of the blade.
 6. Theapparatus of claim 5, wherein the blade comprises a shoulder at aterminal end and wherein the at least one movable substrate clampingmember is adapted to move linearly toward and away from the shoulder. 7.An apparatus, comprising: (a) a robot hub comprising an actuator; (b) alinkage assembly connected at a first end to the robot hub; (c) a wristhousing connected at a second end of the linkage assembly; (d) a bladeconnected to the wrist housing and having a shoulder disposed at one endand forming a pocket for receiving a substrate; (e) a pair of movablesubstrate clamping members linearly extendible relative to the wristhousing and each having a substrate-securing surface at a terminal endadapted to urge a substrate positioned in the pocket toward the shoulderof the blade; and (f) a signal reflecting member disposed on at leastone of the pair of movable substrate clamping members, wherein thesignal reflecting member, during movement of the blade, is positionablein a path of a signal to cause reflection of at least a portion of thesignal, whereby, upon detection of the portion of the signal, theposition of the signal reflecting member is determinable.
 8. Theapparatus of claim 7, wherein the signal reflecting member comprises acylindrical body.
 9. The apparatus of claim 7, wherein the signalreflecting member comprises a metal member having a reflective surfacedisposed thereon, the reflective surface oriented to redirect the signaltoward the detector.
 10. The apparatus of claim 7, a computer incommunication with the robot hub and programmed to move the signalreflecting member into the path of the signal.
 11. The apparatus ofclaim 7, wherein a single reflecting member is disposed on each of thepair of movable substrate clamping members.